Fifth International Conference on Modeling and Simulation of Microsystems (MSM 2002)

Venue: San Juan Marriott Resort & Stellaris Casino

Location: San Juan, Puerto Rico,

Event Date/Time: Apr 22, 2002 End Date/Time: Apr 25, 2002
Registration Date: Apr 25, 2002
Early Registration Date: Feb 24, 2002
Abstract Submission Date: Oct 10, 2001
Paper Submission Date: Dec 17, 2001
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Fifth International Conference on

Modeling and Simulation of Microsystems

MSM 2002

April 22-25, 2002

San Juan Marriott Resort & Stellaris Casino

San Juan, Puerto Rico, U.S.A.

The largest gathering in the field worldwide, MSM is the premier
technical forum for presenting the latest research and development
in modeling and simulation methods, tools and applications
in the MEMS, microelectronic, semiconductor, sensor, materials
and biotechnology fields.

The 2002 ACRS Joint Meeting, MSM & ICCN
Conference will be held at the San Juan Marriott Resort & Stellaris
Casino, San Juan, Puerto Rico, U.S.A. Located on the beach in downtown
San Juan, this world class resort offers the tropical atmosphere
you expect when you dream of your ideal Caribbean Island vacation.

The conference will start Sunday late afternoon with registration
and reception, and adjourn Thursday afternoon. Technical sessions,
and the vendor exhibition run Monday through Thursday. Conference
registration and housing will officially open July 2, 2001.

The conference Technical Proceedings, consisting of articles
submitted by authors of both oral and poster presentations will,
be distributed to participants at registration.

In addition to the Technical Program, an exciting series of Social
Events are being prepared to allow attendees ample opportunity to
interact socially and enjoy the sights and sounds of this tropical
island setting.


The goal of MSM is to bring together researchers, designers,
programmers and vendors involved in microsystem developments
(MEMS microelectronic, semiconductor, sensor, materials and
biotechnology fields). In an effort to dramatically shorten
development time and reduce prototyping costs, simulation
activities have experienced phenomenal growth, generating a
large number of point solutions, as well as integrated tools.
MSM provides a forum for microsystem simulation specialists,
allowing them to be exposed to the state of the art modeling
techniques currently implemented in academic or industrial
research, encouraging a free exchange of ideas and generating
synergies between adjacent specialties. Finally, MSM strives
to help advanced modeling techniques diffuse into industry
and research centers by organizing workshops, demonstrations
and short courses.

MSM Topics and Application Areas


  • Mathematical Modeling and Scaling Laws

  • Numerical Methods

  • Finite and Boundary Element Methods

  • Process, Device and Circuit Simulation

  • Model Calibration, Validation and Metrology

  • Equipment Modeling

  • Co-simulation and Optimization

  • System and Multi-level Modeling

  • Characterization and Reliability

  • Data Bases, Data Exchange and Translators


  • Semiconductors and Microelectronics

  • Quantum Effects, Quantum Devices and Spintronics

  • Advanced Packaging and Interconnects

  • Micro Electro Mechanical Systems (MEMS)

  • Smart Sensors and Structures

  • Advanced Lithography and Photonics

  • Biotechnology

  • DNA Chip Technology and Genomics

  • Microfluidic Systems

  • Electromagnetics, RF, Compact Modeling and Signal Integrity

  • Artificial Intelligence and Expert Systems


Sponsored and Endorsed by

  • National Science Foundation

  • Defense Advanced Research Projects Agency

  • American Physical Society

  • Society for Industrial and Applied Mathematics

  • Alfred P. Sloan Foundation

  • Applied Computational Research Society

  • Institute of Electrical and Electronics Engineers - Electron Devices Society

  • CFD Research Corporation

  • Motorola

  • Coventor, Inc.

  • Intellisense Corp.

  • Molecular Simulations Inc.

  • Swiss Federal Institute of Technology of Lausanne

  • TIMA-CMP Laboratory, France

  • Ibero-American Science and Technology Education Consortium

  • International Association for Mathematical and Computer


Additional Information

Conference Registration

To register for ICCN2001, download the Registration Form (PDF©) and mail your completed form to

ICCN-MSM 2001 Registration
696 San Ramon Valley Blvd.
Suite 423
Danville, CA 94526-4022

or fax it to (509) 696-6416.

Please include payment (check/money order, direct transfer, or major credit card) with your Registration Form.

Fee Schedule

Participant pre-registration (before 2/24/2002) $ 440
Participant registration (after 2/24/2002) $ 490
Student registration (Proceedings not included; proof of status required) $ 275
Additional Tuesday banquet tickets $ 45
Additional copies of Proceedings (reduced from $120) $ 90
Direct transfer or American Express transaction $ 10

For more registration details, see the Registration Form.

Hotel Reservations

Special room rates for attendees

Rooms have been reserved for attendees at the following special low rates (reduced from $288.00):

    Single:$170.00 per night, plus tax
    Double:$170.00 per night, plus tax

Rooms must be booked directly with the hotel, and no later than April 1st, 2002 to obtain the conference rate. To secure a room, fill out the GROUP RESERVATION FORM, and fax it in.

Early reservation is strongly recommended owing to high room demand during the conference period.

Instructions for Authors

Extended Abstract Deadline: October 10th, 2001


Authors are invited to prepare abstracts, two pages in length, including text and figures. Text should be placed on the first page, figures occupying the second page. The abstract must explicitly highlight the new aspects of the work and conclusions that can be drawn; main results must be clearly indicated. The abstract shall be no more than 500 words in length, using no smaller than 12 point type.

The abstract should include the paper title, author's name, affiliation, address, fax and telephone numbers and e-mail. Underline the presenting author and at the bottom of your abstract, indicate the topic area (see list on announcement page) of your paper.

Abstracts will be reviewed and selected according to how well they address the following questions:

  • What are the significant new accomplishments? State unambiguously whether modeling and simulation results have been compared to experimental data, and provide details.
  • What is new in relation to previous work? Provide references to relevant literature (including publications by the author's group).
  • What is the goal or motivation of the work?
  • What is the impact or significance of the results to the semiconductor/sensor/actuator/microanalysis field?

Contributed papers will be considered for either oral or poster presentation unless the authors specifically request the poster session. Oral presentations will be allotted 20 minutes plus 5 minutes for discussion.

Electronic Formats for Abstract Submission

The following electronic file formats may be used for submission of abstracts:

  • Microsoft WordTM
  • Gzipped Postscript
  • Adobe FrameMakerTM
  • text
  • HTML

Electronic Mailing address

Authors are invited to email their abstract to the conference secretariat:

Persons unable to submit an electronic copy of their abstract, may mail four paper copies to the conference secretariat using the address listed in the navigation panel at top left.

Notification of Acceptance: November 12th 2001

Authors will be notified of the acceptance decision by November 12th 2001. Instructions for preparing final papers, and document templates will be posted online at that time.

Final 4-page manuscripts are due December 17, 2001, and will be published in the conference technical proceedings distributed on site and through the international book trade. Manuscript formatting information will appear at this URL after the abstract submission date has passed.