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| Begins |
September 13, 2010
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| Category |
Science: Engineering
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| Category 2 |
Science: Electronics
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| Category 3 |
Education: Science_Education
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| Description |
SPIE Photomask Technology is the premier worldwide technical conference and exhibition for the photomask industry. With the deep sub-wavelength era upon us, the industry's progress will depend on the successful integration and optimization of design, mask-making, and wafer fabrication. Featuring presentations on:
Mask Infrastructure
+ Materials
+ Patterning
+ Resist Processing
+ Etch
+ Inspection
+ Cleaning
+ Repair
+ Metrology
Mask Integration
+ Double patterning
+ Design for Manufacturing/Process Integration and yield optimization
+ Source/mask optimization
+ Simulation and Tolerancing for Hyper-NA Applications
+ Substrates and Materials
+ Extreme NA/Immersion Applications
+ Reticle Enhancement and Optical Proximity Effects
+ Mask Data Preparation and Mask Rules Development
+ Advanced RET
+ DFM Opportunities for Fabless Applications
Emerging Mask Technology
+ Double patterning
+ EUV Mask Materials
+ EUV Mask Infrastructure
+ Imprint
+ Gray Scale Technology
Mask Business
+ Mask Business and Management
+ Direct Write/Maskless Technology
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