The quantitative determination of the properties of micro- and nanostructures is essential in research and development and is a prerequisite for process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which further physical and chemical properties are linked. Quantitative measurements presuppose reliable and stable instruments, suitable measurement procedures as well as calibration artefacts and methods.
The seminar will stimulate the exchange of information between metrologists, users in science and industry as well as manufacturers of relevant hard- and software.